| 摘要 |
<p>A rate sensor (18) of, for example, the planar type is provided with an electro magnetic drive (10) rather than an electrostatic drive. The electro-magnetic drive comprises a magnetic excitation device (10) for generating a magnetic force (Fm) and a paramagnetic region (14) on the vibrating portion (16) of sensor (18) for interacting with said magnetic excitation device so as to excite said vibration. This arrangement has the advantage of permitting appreciable force force to be achieved for gap separations of typically 0.5 mm and awards the need to generate high voltages. Moreover, the problem of dust contamination in narrow gaps is avoided and the effects of air damping can be reduced so that adequate sensitivity can be achieved without the need to operative resonators within a vacuum enclosure. <IMAGE></p> |
