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发明名称
ION IMPLANTING METHOD
摘要
申请公布号
JPH0499020(A)
申请公布日期
1992.03.31
申请号
JP19900208726
申请日期
1990.08.07
申请人
TEL VARIAN LTD
发明人
FUJIKAWA YUICHIRO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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