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发明名称
SPUTTERING SYSTEM
摘要
申请公布号
JPH0499268(A)
申请公布日期
1992.03.31
申请号
JP19900210745
申请日期
1990.08.09
申请人
ANELVA CORP
发明人
KOBAYASHI MASAHIKO;ISHIDA TETSUO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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