| 摘要 |
PURPOSE:To realize a decrease of a summing average number without deteriorating precision in measurement by alternately performing a plural number of space filtering processes and image intensifying processes for data of concentration values obtained from a scanning type electron microscope. CONSTITUTION:A secondary electron signal is inputted to an image processing device from a scanning type electron microscope. Then, these input operations are repeated e.g., four times for the same sample. A summing average is determined for the concentration values of image data inputted four times. Next, a space filtering process is performed for the concentration value of this summing average. The concentration image data after the space filtering process sometimes decrease in amplitudes of the concentration values. Then, an image intensifying process is performed. These space filtering processes and image intensifying processes are repeated in plural numbers. Only noise components are gradually removed by this repetition, and so an image of high SN ratio and of exact pattern edge can be finally obtained. An excellent image can be obtained in this method even if the summing average number is small on input operations. |
