| 摘要 |
PURPOSE:To reduce distortion such as warping or the like as much as possible by providing an electrode for position adjustment in a multiprobe surface so as to hold a sample or a recording medium and the multiprobe surface parallel by electrostatic force. CONSTITUTION:A cantilever 2 (one side supporting burrs) is supported on a base 3 only at the end part due to a gap 8, and by impressing an arbitrary voltage between electrodes 4 and 5, the lever 2 is displaced in a Z direction by the electrostatic force. The voltage of 1.5V is impressed to the electrode base and a tunnel chip, and three probes [(1,A),(20,A) and (10,J) in the third figure] at the end part and one probe [(F,9)] at the central part are used for adjusting the position in the Z direction. A tunnel current is detected by the probe at the central part, and the voltage having the same polarity as the electrode of the base is impressed to an electrode for correcting in-phase distortion so that the detected current value can be almost equal to current values detected by the three probes. Then, the multiprobe surface is made almost parallel to a recording surface.
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