发明名称 SILICON SINGLE CRYSTAL PULL-UP APPARATUS
摘要 A silicon single crystal pull-up apparatus includes a crucible for containing a molten silicon material, an annular heater disposed so as to surround the crucible for heating the silicon material in the crucible, and a plurality of plate-like members made of heat insulation material and disposed so as to surround the heater, each of the plate-like members has an arc-shaped cross section not less than a two-third circle and is connected with each other at respective side edges thereof such that the plurality of the plate-like members are assembled into a shape of a cylinder having wave-like circumferential side walls.
申请公布号 US5098675(A) 申请公布日期 1992.03.24
申请号 US19900464957 申请日期 1990.01.16
申请人 TOSHIBA CERAMICS CO., LTD. 发明人 MATSUO, SHUITSU;ITO, KAZUO;SAITO, MASAYUKI;WADA, YOSHIHISA;SAKAI, YUKIFUMI
分类号 C30B15/10;C30B15/14 主分类号 C30B15/10
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