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发明名称
COATING CHAMBER WITH REGULATED COMPOSITION OF THE GAS MIXTURE
摘要
申请公布号
EP0326843(B1)
申请公布日期
1992.03.18
申请号
EP19890100664
申请日期
1989.01.16
申请人
MULTI-ARC OBERFLAECHENTECHNIK GMBH
发明人
MAXAM, SIEGFRIED;FRINK, LOTHAR
分类号
C23C14/00;H01J37/32
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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