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发明名称
LARGE SCALE SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPS6278848(A)
申请公布日期
1987.04.11
申请号
JP19850218370
申请日期
1985.09.30
申请人
NEC CORP
发明人
TAKAGAKI TAKASHI
分类号
H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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