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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH0474793(A)
申请公布日期
1992.03.10
申请号
JP19900182006
申请日期
1990.07.10
申请人
NEC CORP
发明人
TSUDA KOJI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
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地址
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