| 摘要 |
<p>PURPOSE:To efficiently decompose a gaseous org. halogen compd. of low concn. by sucking gas containing an org. halogen compd. by use of sucking means to introduce to a chamber, and further introducing a vaporized reactive material such as water to the chamber. CONSTITUTION:High frequency current is supplied from a high frequency power source 3 to an induction heating coil 4 to perform induction heating of a metal cylinder 2. If this metal cylinder 2 is made of platinum, the cylinder 2 can be heated to raise the temp, as high as about 1700 deg.C. Further an electric current is applied on a heater 8 to heat a heater tube 7. In this state, a fixed delivery pump 11 is operated to introduce water in a container 10 to the upper part of the heater tube 7 through a water supply tube 9. Thereby, water is heated at high temp., vaporized in the heater tube 7 and then introduced to the chamber 1 from the heater tube 7. The org. halogen compd. and water introduced to the chamber 1 are decomposed and made to react while passed through the metal tube 2 which is heated at high temp. by induction heating.</p> |
