| 摘要 |
K-18217/A Olefinically unsaturated onium salts Olefinically unsaturated onium salts of formulae I and II (I) (II), wherein R1 is a hydrogen atom or methyl and A is a direct bond, phenylene or a radical or , wherein n and o are each independently of the other an integer from 1 to 10, Y1 is -I- or ?-R2 and Y2 is ?-R2, wherein R2 is C1-C4alkyl, unsubstituted or C1-C4alkylsubstituted phenyl, m is 0 or an integer from 1 to 10, and X is BF4, PF6, AsF6, SbF6, SbCl6, FeCl4, SnF6, BiF6, CF3SO3 or SbF5OH, can be copolymerised with an olefinically unsaturated comonomer containing an acid-labile group, and give radiation-sensitive copolymers which can be used direct as photoresists.
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