REACTIVE DRY ETCHING METHOD,申请号JP19900159542-传众专利搜索

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发明名称	REACTIVE DRY ETCHING METHOD
摘要
申请公布号	JPH0448092(A)	申请公布日期	1992.02.18
申请号	JP19900159542	申请日期	1990.06.15
申请人	SHARP CORP	发明人	DEGUCHI HARUHIKO;NAKAMURA TSUNEO
分类号	C23F4/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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