| 摘要 |
PURPOSE:To prevent a polishing unevenness by making the movement of a pressurizing roller soft-landing on the disk surface with its crawling immediately before the pressurizing roller abutting on the disk surface by a variable speed motor. CONSTITUTION:Pressurizing rollers 10a, 10b are displaced at a high speed by a variable speed motor 17 until just before their abutment on a disk 1 and can be subjected to soft landing on the disk 1 by displacing them with crawling while displacing them from just before their abutment on the disk 1 until the positional state that the specific pressurizing force acts. Namely since the abutment of the pressurizing rollers 10a, 10b on the disk 1 is not performed impactly, the bound and vibration of the pressurizing rollers 10a, 10b due to the face deflection accompanied by the rotation of the disk 1 are not caused. The polishing unevenness on the surface of the disk 1 can thus be prevented. |
