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发明名称
ELECTRON BEAM LITHOGRAPHY DEVICE AND ADJUSTING METHOD OF ORTHOGONALITY OF MOLDING APERTURE
摘要
申请公布号
JPH0430415(A)
申请公布日期
1992.02.03
申请号
JP19900135198
申请日期
1990.05.28
申请人
HITACHI LTD
发明人
YAMAGUCHI HIDENORI;MATSUOKA GENYA;IWASAKI TERUO;TAKAHASHI HIROYUKI;ANDO HIROZUMI;KAWASAKI KATSUHIRO
分类号
H01L21/027;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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