发明名称 THIN-FILM COATING METHOD AND APPARATUS THEREFOR
摘要 A thin-film coating method for laminating thin-films to opposing surfaces of a substrate and an apparatus for accomplishing the same. A pair of tack members 10E are respectively disposed of opposite sides of the substrate and are moveable in a direction perpendicular to the direction of conveyance of the substrate so as to temporarily tack forward end portions of the thin-films to the substrate. Compression rollers 16 are movably disposed with respect to the substrate such that the compression rollers can respectively contact forward end portions of the thin-films after the tack members have been removed from the substrate. The compression rollers are rotatable to thereby convey the substrate and to cause the thin films to adhere to the opposing surfaces of the substrate. A void-space preventing agent device 30 is provided in a position upstream to the tacking position. The device 30 deposits a void-space preventing agent in the form of mist on the substrate so as to prevent void spaces from developing on the contacting surfaces between the substrate and each of the films.
申请公布号 CA1294858(C) 申请公布日期 1992.01.28
申请号 CA19880586163 申请日期 1988.12.16
申请人 SOMAR CORPORATION 发明人 SEKI, MITSUHIRO
分类号 G03C1/74;B32B37/22;G03F7/16;H05K3/00;H05K3/06 主分类号 G03C1/74
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