EXPOSURE DEVICE,申请号JP19900097273-传众专利搜索

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发明名称	EXPOSURE DEVICE
摘要
申请公布号	JPH03295222(A)	申请公布日期	1991.12.26
申请号	JP19900097273	申请日期	1990.04.12
申请人	CANON INC	发明人	NAKANO KAZUSHI;SHIOZAWA TAKANAGA
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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