发明名称 FILM EXPOSURE DEVICE
摘要 PURPOSE:To improve feeding precision by having a sprocket gear engaged to a press roll hole while being engaged to a perforation of a film, and pressing almost all of a periphery part of the film on a press roll when step feeding the film. CONSTITUTION:When a feeding roll 33 is driven, the film F interposed between the feeding roll 33 and a press roll 34 is step fed. On the other hand, the sprocket 31 engaged to the perforation P of the film F is rotated, following up the step feeding, the feeding direction of the film F is restricted in the specified direction, and tension is applied to the film F. The gear 31A of the sprocket 31 is engaged through the perforation P of the film F to a hole 32A of the press roll 32, and almost all of the periphery part of the perforation P of the film F is surely pressed by a press surface 32B of a press roll 32. Thus, the feeding precision of the film F can be improved.
申请公布号 JPH03282474(A) 申请公布日期 1991.12.12
申请号 JP19900081335 申请日期 1990.03.30
申请人 USHIO INC 发明人 SUZUKI SHIGERU
分类号 G03B27/58;G03F7/20;H01L21/027;H01L21/30;H05K3/00 主分类号 G03B27/58
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