| 摘要 |
<p>A process of forming bumps on respective electrodes (118a to 118v) of a semiconductor chip (SC21) comprises the steps of a) preparing a bonding apparatus equipped with a bonding tool (114) three-dimensionally movable, b) forming a small ball at the leading end of a bonding wire passing through the bonding tool, c) causing the bonding tool to press the small ball against the upper surface of one of the electrodes for bonding thereto, d) moving the bonding tool in a direction leaving from the upper surface of the electrode by a distance, e) moving the bonding tool in a horizontal direction (X21 or Y21) substantially parallel to the upper surface of the electrode so that the bonding wire is cut from the small ball with the leading end of the bonding tool, and f) repeating the steps b) to e) for producing bumps on the respective upper surfaces of the other electrodes, in which the horizontal direction is different depending upon the location of the electrode.</p> |
