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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03278539(A)
申请公布日期
1991.12.10
申请号
JP19900079240
申请日期
1990.03.28
申请人
NEC CORP
发明人
SATO HIROYUKI
分类号
H01L21/3205;H01L21/321;H01L21/60;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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