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发明名称
INTER-ATOMIC FORCE MEASURING MICROSCOPE
摘要
申请公布号
JPH03259709(A)
申请公布日期
1991.11.19
申请号
JP19900059631
申请日期
1990.03.09
申请人
NIKON CORP
发明人
FUJII TORU
分类号
G01B21/20;G01Q20/02;G01Q60/24;G01Q60/26;H01J37/28
主分类号
G01B21/20
代理机构
代理人
主权项
地址
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