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发明名称
SEMICONDUCTOR DEVICE STORAGE JIG
摘要
申请公布号
JPH03241851(A)
申请公布日期
1991.10.29
申请号
JP19900039284
申请日期
1990.02.20
申请人
SUMITOMO ELECTRIC IND LTD
发明人
HASHINAGA TATSUYA
分类号
G01R31/26;H01L21/66;H01L21/673
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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