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发明名称
ETCHING METHOD
摘要
申请公布号
JPH03242931(A)
申请公布日期
1991.10.29
申请号
JP19900039953
申请日期
1990.02.21
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KUBOTA MASABUMI;NOMURA NOBORU
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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