LASER DEVICE

摘要

The present invention relates to a technique which is effectively applied to the control of an oscillation wavelength and an oscillation output in a laser device. The object of the invention is to adjust an angle of inclination of a wavelength selection element such as an etalon with high accuracy to always stabilize a laser output wavelength from a laser resonator. The present invention provides a laser device having at least first and second wavelength selection elements arranged in series on a light path, at least one angle of inclination being adjusted to form a laser light from a laser medium into a narrower band, said laser device comprising an automatic micrometer head for finely adjusting said angle of inclination. By using an automatic micrometer head capable of finely controlling a moving amount, fine adjustment of an angle of inclination with respect to a light path of a wavelength selection element can be made. Therefore, it is possible to always stabilize a wavelength of a laser light released from a laser resonator. Accordingly, the present invention can be effectively utilized for uses such as a light source in a lithography step in the manufacture of a semiconductor.