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发明名称
SUBSTRATE HEATING MECHANISM
摘要
申请公布号
JPH03230205(A)
申请公布日期
1991.10.14
申请号
JP19900026728
申请日期
1990.02.05
申请人
NEC CORP
发明人
YASUMATSU MASAHIRO
分类号
G01J5/00;G05D23/27;H01L21/26;H01L21/66
主分类号
G01J5/00
代理机构
代理人
主权项
地址
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