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发明名称
METHOD OF MEASURING THICKNESS OF LAYER ON SUBSTRATE
摘要
申请公布号
SU1682774(A1)
申请公布日期
1991.10.07
申请号
SU19894747112
申请日期
1989.07.13
申请人
MGU IM.M.V.LOMONOSOVA
发明人
KRUTKOVA SVETLANA A,SU;KOSTIENKO ANATOLIJ I,SU;AFONIN DMITRIJ G,SU;GAPOCHKA MIKHAIL G,SU;ALEKSEEV YURIJ K,SU
分类号
G01B15/00
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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