Cooling device for electrical circuit configurations

摘要

The invention relates to a cooling device for circuit configurations in which high electrical energies are converted and specifically for electrical matching circuits with which the impedance of a plasma path is matched to a high frequency generator. Herein one or several coils are provided with a water cooling system in such a way that the cooling water is completely separated from the electromagnetic fields through metallic material. These coils consist of two tubes slid one into the other, wherein the cooling water is fed and drawn through the internal tube and between the two tubes so that it is completely within the field-free region.