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发明名称
WAFER CLEANING JIG
摘要
申请公布号
JPH03209722(A)
申请公布日期
1991.09.12
申请号
JP19900003883
申请日期
1990.01.11
申请人
FUJITSU LTD
发明人
IRINO KIYOSHI
分类号
C03B20/00;H01L21/304
主分类号
C03B20/00
代理机构
代理人
主权项
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