| 摘要 |
<p>A lithographic projection apparatus is described which comprises an alignment device (AS1, AS2), a focusing device (FD), a substrate table positioning device (IF), as well as a projection image detection device (IS). The different devices are coupled together via a reference plate (RP) with which all devices cooperate. The image detection device which is implemented in a special manner can simultaneously process the information of different grating marks (P3, P4, P5) in the reference plate, while measurements can be carried out rapidly and accurately and an optimum image quality can be obtained. <IMAGE></p> |
