LAMP HEATING TYPE HEAT TREATMENT APPARATUS,申请号JP19900001907-传众专利搜索

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发明名称	LAMP HEATING TYPE HEAT TREATMENT APPARATUS
摘要
申请公布号	JPH03206611(A)	申请公布日期	1991.09.10
申请号	JP19900001907	申请日期	1990.01.08
申请人	NEC CORP	发明人	TSUCHIYA YOSHIAKI
分类号	H05B3/10;H01L21/26	主分类号	H05B3/10
代理机构		代理人
主权项
地址

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