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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH03193868(A)
申请公布日期
1991.08.23
申请号
JP19890331680
申请日期
1989.12.21
申请人
TOYOTA MOTOR CORP
发明人
ICHIKAWA SHOICHI;SHIMIZU TATSUHIKO;NAGAMI TETSUO;YONEKURA YOKO
分类号
C23C14/32;C23C14/08;C23C14/24;C23C14/34
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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