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发明名称
PLASMA PROCESS DEVICE
摘要
申请公布号
JPH03191067(A)
申请公布日期
1991.08.21
申请号
JP19890329945
申请日期
1989.12.20
申请人
FUJITSU LTD
发明人
SUGITA YOSHIHIRO;NARA YASUO
分类号
C23C16/48;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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