发明名称 ION LASER APPARATUS
摘要 PURPOSE:To maintain an accurate and stable confrontation relationship by a method wherein a confrontation relationship between a gimbal ring and a mirror which constitute an optical resonator is adjusted via a plurality of piezoelectric acutators. CONSTITUTION:A laser tube 11 is fixed by using a support structure which is composed of a plurality of supports 12 and a plurality of plates 13; and gimbal rings 15 which support mirrors 14 come into contact with the supports 12 via piezoelectric actuators 16 for position adjustment use. When a voltage at both ends of the piezoelectric actuators 16 is changed, the thickness of the piezoelectric actuators 16 is changed and a confrontation relationship between the gimbal rings 15 and the mirrors 14 is adjusted. Thereby, the confrontation relationship between the gimbal rings 15 and the mirrors 14 can accurately be decided and stably be maintained.
申请公布号 JPH03191587(A) 申请公布日期 1991.08.21
申请号 JP19890332058 申请日期 1989.12.20
申请人 NEC CORP 发明人 SHINSHI NAGATAKE
分类号 H01S3/086;H01S3/105;H01S3/139 主分类号 H01S3/086
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