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发明名称
MANUFACTURE OF DIELECTRIC ISOLATION SUBSTRATE
摘要
申请公布号
JPH03190129(A)
申请公布日期
1991.08.20
申请号
JP19890330005
申请日期
1989.12.19
申请人
FUJITSU LTD
发明人
HASHIMOTO YUKIHIRO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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