| 摘要 |
PURPOSE: To determine a polar or nonpolar liquid and measure NH3 , NH4 OH, NO2 , and N2 O3 by using a polyimide waveguide containing at least one layer made of polyamide-imide or perfluoropolyimide. CONSTITUTION: It is preferable to constitute a polyimide waveguide in four layers. The four layers are respectively composed of a cover layer, a hexafluoro- iso-propylidene-2,2'-di(3-aminobenzene) layer, a hexafluoro-iso-propylidene-2,2'-di(4- aminobenzene) layer, and a substrate. The cover layer, a gas space (measuring space), and substrate are made of glass. This polyimide waveguide can be used as an optical sensor for measuring a vapor-phase liquid, its strip waveguide, a structural polyimide waveguide which is constituted in an interferometer structure. |
