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发明名称
MASS-FLOW-RATE CONTROLLING APPARATUS
摘要
申请公布号
JPH03179221(A)
申请公布日期
1991.08.05
申请号
JP19890318361
申请日期
1989.12.06
申请人
FUJITSU LTD
发明人
MARUYAMA KENJI;MURAKAMI SATOSHI;SAWADA AKIRA;EBE KOJI
分类号
G01F1/48
主分类号
G01F1/48
代理机构
代理人
主权项
地址
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