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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS57100737(A)
申请公布日期
1982.06.23
申请号
JP19800176477
申请日期
1980.12.16
申请人
TOKYO SHIBAURA DENKI KK
发明人
MATSUDA HIDEO
分类号
H01L21/52;H01L23/051;H01L23/48;(IPC1-7):H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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