发明名称 |
Electric device with grains and an insulating layer |
摘要 |
An electric device comprises a crystalline film deposited on a substrate and an electrode formed on the film. The crystalline film consists of a number of colomnar crystal grown at right angles from the surface of the substrate. There are many grain boundaries passing through the crystalline film from the substrate surface to the electrode. The direct contact between the electrode and the grain boundaries is prevented by means of an insulating coating applied only to the portion of surfaces of the columnar crystals where the boundaries appear.
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申请公布号 |
US5036373(A) |
申请公布日期 |
1991.07.30 |
申请号 |
US19900513870 |
申请日期 |
1990.04.24 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUNPEI |
分类号 |
C23C16/27;C23C16/34;H01L29/06;H01L33/00;H01L33/32;H01L33/34;H01L33/40;H01L33/44;H01L51/05 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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