| 摘要 |
PURPOSE:To maintain the contact pressure of a slider to be constant and to stably operate a slide table by a specified driving force by obtaining a contact pressure of the slider in pressure-contact with a transmission rod, from a constant-load elastic member or constant fluid pressure. CONSTITUTION:A piezoelectric vibrator 1a is excited by application of a high frequency voltage, a transmission rod 2 is fixed to the piezoelectric vibrator 1a, and a slider 3 is in pressure-contact with the transmission rod 2. By exciting the piezoelectric vibrator 1a, one way progressive wave is produced on the transmission rod 2, and this progressive wave generates a driving force, in a direction opposite to that of propagation of the progressive wave, on the slider 3. This driving force moves the slider 3 in a direction opposite to that of propagation of the progressive wave. A contact pressure of the slider 3 in pressure-contact with the transmission rod 2 is obtained from a constant-load elastic member, the load of which is constant independent of stroke, or a fluid pressure controlled to be constant. This enables the contact pressure of the slider 3 to be always constant, and the slider 3 can be operated by a stable driving force. |
