发明名称 |
Hard and lubricant thin film of amorphous carbon-hydrogen-silicon, iron base metallic material coated therewith, and the process for producing the same. |
摘要 |
<p>A hard and lubricant thin film of amorphous carbon-hydrogen-silicon and a process for producing the same. The thin film comprises carbon and hydrogen as major components, the balance mainly containing a silicon-based material, and it contains diamond-like carbon. The content of hydrogen is from 30 to 50 % by atomic and the content of carbon is 70 % by atomic or more with respect to the total composition except hydrogen. An iron-based metallic material having the thin film of amorphous carbon-hydrogen-silicon formed thereon and a process for producing the same are also provided. The iron-based metallic material is very hard and has a small coefficient of friction.</p> |
申请公布号 |
EP0435312(A1) |
申请公布日期 |
1991.07.03 |
申请号 |
EP19900125668 |
申请日期 |
1990.12.28 |
申请人 |
KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO |
发明人 |
ARAI, TOHRU;OGURI, KAZUYUKI |
分类号 |
C23C16/26 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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