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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH03149872(A)
申请公布日期
1991.06.26
申请号
JP19890289394
申请日期
1989.11.07
申请人
AISIN SEIKI CO LTD
发明人
NODA SHUJI
分类号
H01L21/762;H01L21/76;H01L21/8228;H01L27/082
主分类号
H01L21/762
代理机构
代理人
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