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发明名称
APPARATUS AND METHOD FOR WET-ETCHING
摘要
申请公布号
JPH03150373(A)
申请公布日期
1991.06.26
申请号
JP19890289611
申请日期
1989.11.07
申请人
SHARP CORP
发明人
MATSUOKA NORIHIRO
分类号
B05D1/18;C23F1/08
主分类号
B05D1/18
代理机构
代理人
主权项
地址
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