发明名称 CASSETTE FOR SUBSTRATE
摘要 <p>PURPOSE:To prevent an edge of a substrate from chipping off a side board with groove and to prevent damages of a pattern surface of the substrate by forming the side board with groove to a shape having a projecting rib-like shelf piece, by tilting the shelf piece and by forming a projecting part on an upper side of the shelf piece. CONSTITUTION:In a cassette to put in and out and contain a substrate B between corresponding grooves of a side board 2, the side board 2 is formed to a shape having rib-like shelf piece 22 which projects on both sides of a back thickness part 21. While a shelf piece 22X which projects inside a cassette is tilted, a projecting part 23 is formed on an upper side of the shelf piece 22X. Thereby, it is possible to reduce development of chipping scraps due to contact between the side board 2 with groove and the substrate B and to prevent damages of a pattern surface of the substrate B effectively.</p>
申请公布号 JPH03133152(A) 申请公布日期 1991.06.06
申请号 JP19890271391 申请日期 1989.10.18
申请人 YODOGAWA KASEI KK 发明人 YOSHIDA TOSHIO;SAITO KUNIHARU
分类号 H01L21/673;B65D85/48;C03C17/00;G02F1/13;H01L21/68 主分类号 H01L21/673
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