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经营范围
发明名称
FOREIGN MATTER INSPECTION DEVICE
摘要
申请公布号
JPH03125450(A)
申请公布日期
1991.05.28
申请号
JP19890263206
申请日期
1989.10.09
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
DANSUI YOSHITAKA
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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