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发明名称
ION IMPLANTATION PROCESS
摘要
申请公布号
JPH0399429(A)
申请公布日期
1991.04.24
申请号
JP19890235938
申请日期
1989.09.12
申请人
FUJITSU LTD;KYUSHU FUJITSU ELECTRON:KK
发明人
TABUCHI SHUJI;EIFUKU SHIYUUMA
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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