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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
JPH0395913(A)
申请公布日期
1991.04.22
申请号
JP19890231380
申请日期
1989.09.08
申请人
CANON INC
发明人
CHINJU HIDEYUKI;MIZUSAWA NOBUTOSHI;IWAMOTO KAZUNORI;KARIYA TAKUO;UDA KOJI;UZAWA SHUNICHI
分类号
F16F15/02;G03F7/20;H01L21/027;H01L21/30
主分类号
F16F15/02
代理机构
代理人
主权项
地址
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