申请人 |
HITACHI, LTD.;HITACHI CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
SHOJI, FUSAJI, SHINANOCHO TOTSUKA-KU YOKOHAMA, JP;MATSUYAMA, HARUHIKO, HIRATSUKA-SHI, JP;FUJIWARA, AKIO, FUJISAWA-SHI, JP;KATAOKA, FUMIO, TOTSUKA-SHI YOKOHAMA, JP;AIZAWA, TERUKI, OZAKATA SHIMODATE-SHI, JP |