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发明名称
SEMICONDUCTOR INSPECTING METHOD AND INSPECTING EQUIPMENT USING THE SAME
摘要
申请公布号
JPH0360140(A)
申请公布日期
1991.03.15
申请号
JP19890195985
申请日期
1989.07.28
申请人
TOKYO ELECTRON LTD;TOKYO EREKUTORON TOHOKU KK
发明人
SASAKI HIDETOSHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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