| 摘要 |
PURPOSE:To obtain high position accuracy and to enhance workability and productivity by maintaining always the specified relative distance between contact pins and the patterns on a mask and registering an exposing object and the mask patterns via the contact pins. CONSTITUTION:The contact pins 1 are mounted to the surface on the exposing object side of the contact pins 1 or a mask holder 3. A vacuum mechanism 10 for fixing the exposing object and a blower mechanism 7 for floating and registering the exposing object, then bringing the object into tight contact by the pressure of air are provided on a stage 6. The relative distance of the position of the pattern formed on the mask 2 and the position of the pins 1 is, therefore, constant. The blower is easier to regulate pressure than with the vacuum mechanism 10 and, therefore, the application of the sufficient pressure necessary for bringing the mask 2 and the exposing object 8 into contact with each other is possible. The device having the high accuracy, low cost and high productivity is obtd. in this way. |
