| 摘要 |
In modern electron beam writers, the subject to be structured is simultaneously processed with a plurality of probes or electron beams. The apparatus of the present invention, instead of sub-dividing a single electron beam into a plurality of probes, utilizes a beam generator having a plurality of sources of electron beams, which are arranged line-like and are imaged demagnified with the assistance of a telecentric electron optical arrangement onto the subject which is to be processed or structured.
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