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发明名称
DEVICE MANUFACTURE INVOLVING LITHOGRAPHIC PROCESSING
摘要
申请公布号
CA2020237(A1)
申请公布日期
1991.02.08
申请号
CA19902020237
申请日期
1990.06.29
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
BERGER, STEVEN D.;GIBSON, JOHN M.
分类号
G03F1/16;G03F7/20;H01J37/317;H01L21/027;H01L21/30
主分类号
G03F1/16
代理机构
代理人
主权项
地址
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